Ultra‐Large Scale Stitchless AFM: Advancing Nanoscale Characterization and Manipulation with Zero Stitching Error and High Throughput (Small 1/2024)
Source abstract
Abstract
Atomic Force Microscopy In article number 2303838, Yingchun Guan, Zhen Zhang, and co-workers present an ultra-large scale stitchless atomic force microscopy (AFM) through a synergistic integration with a compliant nano-manipulator. It enables high-throughput characterization of ultra-large scale samples without stitching or bow errors, expanding the scanning area of conventional AFMs by two orders of magnitude.
Source: openalex_inverted_index · Quality: baseline
Research context
OpenAlex topics: Force Microscopy Techniques and Applications · Nanofabrication and Lithography Techniques · Integrated Circuits and Semiconductor Failure Analysis
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Affiliations
State Key Laboratory of Tribology in Advanced Equipment, Department of Mechanical Engineering Tsinghua University Beijing 100084 China
Beijing Key Laboratory of Precision/Ultra‐precision Manufacturing Equipments and Control Tsinghua University Beijing 100084 China
School of Mechanical Engineering and Automation Beihang University 37 Xueyuan Road Beijing 100191 China
NT‐MDT Spectrum Instruments China office Beijing 100053 China
References
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