Bloch Surface Waves Mediated Micro‐Spectroscopy

Abstract Micro‐spectroscopy is a critical instrument for spectrum analysis in various applications such as chemical and biological analysis, environment detection, and hyperspectral imaging. However, current micro‐spectral technique requires bulky and costly spectrometer. In this report, a new type of Bloch surface wave (BSW) based micro‐spectrometer is proposed. A single silicon nanoparticle sitting on a dielectric multilayer substrate is used to excite the BSW which acts as a nanoscale unknown source. Taking advantage of the dispersion relations of BSWs, an abundant spectrally related database is formed that is useful for spectrum retrieval applications. Back‐focal plane images are used to monitor the change of angular spectrum corresponding to the dispersion relationship of Bloch surface waves. Combined with an iterative algorithm, experimental retrieval of visible‐range monochromatic and broadband light spectrums can be obtained. The resolution of the spectrometers can reach 2 nm across a wavelength range of 130 nm. The method in this work is CMOS compatible, enabling spectra retrieval for nanoscale radiators and can also be used to measure and retrieve the microscopic spectrum signal rapidly and timely without conventional scanning monochromator spectrometer.