High‐Damping Carbon Nanotube Hinged Micromirrors

New developments in digital mirror devices (DMDs) require suspension hinges with a good damping and high temperature stability. Carbon nanotubes (CNTs) offer these unique properties. Herein it is shown how CNT hinges can be integrated in micromirrors. The image illustrates a micromirror with a CNT suspension, and a typical overdamped stepresponse (Q-factor < 0.5). Detailed facts of importance to specialist readers are published as ”Supporting Information”. Such documents are peer-reviewed, but not copy-edited or typeset. They are made available as submitted by the authors. Please note: The publisher is not responsible for the content or functionality of any supporting information supplied by the authors. Any queries (other than missing content) should be directed to the corresponding author for the article.