Oxidation Sharpening, Template Stripping, and Passivation of Ultra‐Sharp Metallic Pyramids and Wedges
Source abstract
Abstract
Ultra-sharp metallic pyramids and wedges with tunable tip angles and 5-nm tip radii are replicated from oxidation-sharpened silicon templates with high throughput (80 million pyramids per wafer). Atomic layer deposition of Al2 O3 shells can protect these sharp pyramidal tips for subsequent usage in near-field imaging.
Source: openalex_inverted_index · Quality: baseline
Research context
OpenAlex topics: Near-Field Optical Microscopy · Integrated Circuits and Semiconductor Failure Analysis · Nanowire Synthesis and Applications
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Department of Electrical and Computer Engineering University of Minnesota Minneapolis, 200 Union St. S.E. Minneapolis MN 55455 USA
References (36)
Show source-provided references
1. 10.1103/PhysRevLett.79.64510.1103/PhysRevLett.79.645 ↗
2. 10.1063/1.37241410.1063/1.372414 ↗
3. 10.1103/PhysRevLett.90.01390310.1103/PhysRevLett.90.013903 ↗
4. 10.1103/PhysRevLett.93.13740410.1103/PhysRevLett.93.137404 ↗
5. 10.1021/nl071340m10.1021/nl071340m ↗
6. 10.1038/nphoton.2009.28210.1038/nphoton.2009.282 ↗
7. 10.1017/CBO978051179419310.1017/CBO9780511794193 ↗
8. 10.1103/PhysRevLett.96.11300210.1103/PhysRevLett.96.113002 ↗
9. 10.1021/nn303496g10.1021/nn303496g ↗
10. 10.1021/cm071231910.1021/cm0712319 ↗
11. 10.1126/science.117465510.1126/science.1174655 ↗
12. 10.1021/nl904294u10.1021/nl904294u ↗
13. 10.1088/0034-4885/75/3/03650110.1088/0034-4885/75/3/036501 ↗
14. 10.1021/nn202013v10.1021/nn202013v ↗
15. 10.1021/nl200573710.1021/nl2005737 ↗
16. 10.1103/PhysRevLett.100.02390110.1103/PhysRevLett.100.023901 ↗
17. 10.1364/OE.16.00525210.1364/OE.16.005252 ↗
18. 10.1063/1.273269910.1063/1.2732699 ↗
19. 10.1109/84.65012610.1109/84.650126 ↗
20. 10.1109/JMEMS.2002.80092410.1109/JMEMS.2002.800924 ↗
21. 10.1116/1.277904110.1116/1.2779041 ↗
22. 10.1109/16.241210.1109/16.2412 ↗
23. 10.1007/s00339-002-1450-410.1007/s00339-002-1450-4 ↗
24. 10.1021/nl050614810.1021/nl0506148 ↗
25. 10.1021/jp077457g10.1021/jp077457g ↗
26. 10.1021/jp809812610.1021/jp8098126 ↗
27. 10.1002/jrs.426810.1002/jrs.4268 ↗
28. 10.1149/1.222116210.1149/1.2221162 ↗
29. 10.1021/ja063876010.1021/ja0638760 ↗
30. 10.1021/nn901842r10.1021/nn901842r ↗
31. 10.1002/jrs.239510.1002/jrs.2395 ↗
32. 10.1021/cr900056b10.1021/cr900056b ↗
33. 10.1021/jp074462b10.1021/jp074462b ↗
34. 10.1016/S0009-2614(99)01451-710.1016/S0009-2614(99)01451-7 ↗
35. 10.1002/adfm.20120343210.1002/adfm.201203432 ↗
36. 10.1038/nphoton.2009.2610.1038/nphoton.2009.26 ↗