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journal article·2022-02Open access

Simultaneous Dimensional and Analytical Characterization of Ordered Nanostructures

Philipp Hönicke, Yves Kayser, Konstantin V. Nikolaev, Victor Soltwisch, Jeroen E. Scheerder, Claudia Fleischmann, Thomas Siefke, Anna Andrle, Grzegorz Gwalt, Frank Siewert, Jeffrey Davis, Martin Huth, Anabela Veloso, Roger Loo, Dieter Skroblin, Michael Steinert, Andreas Undisz, Markus Rettenmayr, Burkhard Beckhoff

Small· Volume 18· Issue 6
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Source abstract

Abstract

Abstract The spatial and compositional complexity of 3D structures employed in today's nanotechnologies has developed to a level at which the requirements for process development and control can no longer fully be met by existing metrology techniques. For instance, buried parts in stratified nanostructures, which are often crucial for device functionality, can only be probed in a destructive manner in few locations as many existing nondestructive techniques only probe the objects surfaces. Here, it is demonstrated that grazing exit X‐ray fluorescence can simultaneously characterize an ensemble of regularly ordered nanostructures simultaneously with respect to their dimensional properties and their elemental composition. This technique is nondestructive and compatible to typically sized test fields, allowing the same array of structures to be studied by other techniques. For crucial parameters, the technique provides sub‐nm discrimination capabilities and it does not require access‐limited large‐scale research facilities as it is compatible to laboratory‐scale instrumentation.
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Research context

Nanomaterials

OpenAlex topics: X-ray Spectroscopy and Fluorescence Analysis · Electron and X-Ray Spectroscopy Techniques · Ion-surface interactions and analysis

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Div. 7 ‐ Temperature and Synchrotron Radiation Physikalisch‐Technische Bundesanstalt (PTB) Abbestr. 2‐12 10587 Berlin Germany

NRC Kurchatov Institute pl. Akademika Kurchatova 1 Moscow 123182 Russia

imec Kapeldreef 75 Leuven 3001 Belgium

Quantum Solid‐State Physics KU Leuven, Celestijnenlaan 200D Leuven 3001 Belgium

Abbe Center of Photonics Friedrich Schiller University Jena Max‐Wien‐Platz 1 07745 Jena Germany

Helmholtz Zentrum Berlin für Materialien und Energie (HZB) Albert‐Einstein‐Str. 15 12489 Berlin Germany

EOS GmbH Robert‐Stirling‐Ring 1 82152 Krailling Germany

PNDetector GmbH Otto‐Hahn‐Ring 6 81739 München Germany

Technische Universität Chemnitz Inst. für Werkstoffwiss. und Werkstofftech. Erfenschlager Straße 73 09125 Chemnitz Germany

Otto Schott Institute of Materials Research Friedrich Schiller University Jena Löbdergraben 32 07743 Jena Germany

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