Trace Detection of Hydrogen Peroxide Vapor Using a Carbon‐Nanotube‐Based Chemical Sensor

Abstract The sensitive detection of hydrogen peroxide in the vapor phase is achieved using a nanochemical sensor consisting of single‐walled carbon nanotubes as the sensing material. The interdigitated electrode‐based sensor is constructed using a simple and standard microfabrication approach. The test results indicate a sensing capability of 25 ppm and response and recovery times in seconds. The sensor array consisting of 32 sensor elements with variations in sensing materials is capable of discriminating hydrogen peroxide from water and methanol.