journal article·2024-12Open access

On‐Chip Thermoelectric Devices Based on Standard Silicon Processing (Small 51/2024)

Elisabetta Dimaggio, Antonella Masci, Amedeo De Seta, Marc Salleras, Luis Fonseca, Giovanni Pennelli

Small· Volume 20· Issue 51

Abstract

Thermoelectric Devices In article number 2405411, Elisabetta Dimaggio, and co-workers present an on-chip thermoelectric generator for efficient heat-to-electricity conversion. This thermoelectric device is based on hundreds of interconnected, tall, thin silicon nanobeams, which guarantee a reduced thermal conductivity. The design and the standard IC fabrication process allow to achieve high mechanical stability and high-power density.
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Research context

OpenAlex topics: Advanced Thermoelectric Materials and Devices

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Affiliations

Dipartimento di Ingegneria della Informazione Università di Pisa Via G.Caruso I‐56122 Pisa Italy

Instituto de Microelectrónica de Barcelona (IMB‐CNM, CSIC) Campus UAB Bellaterra Barcelona 08193 Spain

References

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