journal article·2022-06Open access

Gentle Patterning Approaches toward Compatibility with Bio‐Organic Materials and Their Environmental Aspects

Artem K. Grebenko, Konstantin A. Motovilov, Anton V. Bubis, Albert G. Nasibulin

Small· Volume 18· Issue 22

Abstract

Abstract Advances in material science, bioelectronic, and implantable medicine combined with recent requests for eco‐friendly materials and technologies inevitably formulate new challenges for nano‐ and micropatterning techniques. Overall, the importance of creating micro‐ and nanostructures is motivated by a large manifold of fundamental and applied properties accessible only at the nanoscale. Lithography is a crucial family of fabrication methods to create prototypes and produce devices on an industrial scale. The pure trend in the miniaturization of critical electronic semiconducting components has been recently enhanced by implementing bio‐organic systems in electronics. So far, significant efforts have been made to find novel lithographic approaches and develop old ones to reach compatibility with delicate bio‐organic systems and minimize the impact on the environment. Herein, such delicate materials and sophisticated patterning techniques are briefly reviewed.
Source: crossref · Quality: baseline

Research context

OpenAlex topics: Advanced Sensor and Energy Harvesting Materials · Nanofabrication and Lithography Techniques · Modular Robots and Swarm Intelligence

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Skolkovo Institute of Science and Technology Nobel str. 3 Moscow 121205 Russia

Center for Photonics and 2D Materials Moscow Institute of Physics and Technology Institute Lane 9 Dolgoprudny 141701 Russia

Institute of Solid State Physics Russian Academy of Sciences 2 Academician Ossipyan str. Chernogolovka 142432 Russia

Department of Chemistry and Materials Science Aalto University P.O. Box 16100 Aalto FI‐00076 Finland

Funding

Russian Science Foundation · Ministry of Science and Higher Education of the Russian Federation · Council on grants of the President of the Russian Federation

References (100+)

Show source-provided references
1. of Engineering N. A. · 2016
2. 10.1038/496159a10.1038/496159a ↗
3. 10.3389/fnins.2021.66744710.3389/fnins.2021.667447 ↗
4. 10.2147/JPR.S10888410.2147/JPR.S108884 ↗
5. Neural Prostheses for Restoration of Sensory and Motor Function https://www.routledge.com/Neural-Prostheses-for-Restoration-of-Sensory-and-Motor-Function/Chapin-Moxon/p/book/9780367398088(accessed: October 2021).
6. 10.1038/nrn219610.1038/nrn2196 ↗
7. Pericolini M. · Neuromodulation J. Int. Soc. · 2021
8. 10.1007/978-3-319-28612-9_210.1007/978-3-319-28612-9_2 ↗
9. C. for D. and R. Health FDA https://www.fda.gov/medical-devices/pma-approvals/devices-approved-2021(accessed: October 2021).
10. 10.1007/s00422-018-0774-x10.1007/s00422-018-0774-x ↗
11. Effect of High‐frequency (10‐kHz) Spinal Cord Stimulation in Patients With Painful Diabetic Neuropathy: A Randomized Clinical Trial | Neurology | JAMA Neurology | JAMA Network https://jamanetwork.com/journals/jamaneurology/fullarticle/2777806(accessed: October 2021).
12. 10.1126/sciadv.160207610.1126/sciadv.1602076 ↗
13. 10.1073/pnas.170388611410.1073/pnas.1703886114 ↗
14. 10.1038/nature2100410.1038/nature21004 ↗
15. 10.1557/mrs.2016.32510.1557/mrs.2016.325 ↗
16. 10.1126/science.aah449610.1126/science.aah4496 ↗
17. 10.1021/jacs.8b0168210.1021/jacs.8b01682 ↗
18. 10.1021/cm402200310.1021/cm4022003 ↗
19. 10.1126/science.118238310.1126/science.1182383 ↗
20. 10.1038/s41528-020-0065-110.1038/s41528-020-0065-1 ↗
21. 10.1126/science.112140110.1126/science.1121401 ↗
22. 10.1021/acsami.8b0840910.1021/acsami.8b08409 ↗
23. 10.1021/acsami.9b0757810.1021/acsami.9b07578 ↗
24. 10.1038/s41531-021-00209-310.1038/s41531-021-00209-3 ↗
25. 10.1038/nature2463610.1038/nature24636 ↗
26. 10.1016/j.bios.2020.11241010.1016/j.bios.2020.112410 ↗
27. 10.1021/ja211714w10.1021/ja211714w ↗
28. 10.1038/ncomms1298510.1038/ncomms12985 ↗
29. 10.1002/adma.20200750210.1002/adma.202007502 ↗
30. 10.1088/1742-6596/1052/1/01200710.1088/1742-6596/1052/1/012007 ↗
31. 10.1002/adfm.20210516910.1002/adfm.202105169 ↗
32. 10.1002/adma.20210126210.1002/adma.202101262 ↗
33. 10.1038/s41592-021-01270-910.1038/s41592-021-01270-9 ↗
34. 10.1021/acs.chemrev.8b0019810.1021/acs.chemrev.8b00198 ↗
35. V.Forti C. P.Baldé R.Kuehr G.Bel The Global E‐waste Monitor International Telecommunication Union (ITU) & International Solid Waste Association (ISWA) Bonn Geneva Rotterdam2020 p.120 https://www.itu.int/en/ITU-D/Environment/Documents/Toolbox/GEM_2020_def.pdf.
36. 10.1039/C3CS60235D10.1039/C3CS60235D ↗
37. 10.1088/0034-4885/76/3/03450110.1088/0034-4885/76/3/034501 ↗
38. 10.3390/cryst1107083810.3390/cryst11070838 ↗
39. 10.3390/ijms1908238210.3390/ijms19082382 ↗
40. 10.1070/RCR497310.1070/RCR4973 ↗
41. 10.1002/smll.20190033210.1002/smll.201900332 ↗
42. 10.1021/acs.chemmater.0c0420410.1021/acs.chemmater.0c04204 ↗
43. 10.1016/j.orgel.2018.02.00610.1016/j.orgel.2018.02.006 ↗
44. 10.1088/2058-8585/1/2/02300110.1088/2058-8585/1/2/023001 ↗
45. 10.1007/s00339-012-7411-710.1007/s00339-012-7411-7 ↗
46. 10.3389/fpls.2014.0051110.3389/fpls.2014.00511 ↗
47. 10.1089/ars.2009.270410.1089/ars.2009.2704 ↗
48. 10.1021/nn500759k10.1021/nn500759k ↗
49. 10.1038/nature1399110.1038/nature13991 ↗
50. 10.1063/1.176960610.1063/1.1769606 ↗
51. 10.1073/pnas.171881011510.1073/pnas.1718810115 ↗
52. 10.1016/j.tibtech.2020.12.00510.1016/j.tibtech.2020.12.005 ↗
53. 10.1007/s10295-020-02312-510.1007/s10295-020-02312-5 ↗
54. 10.1038/nature1158610.1038/nature11586 ↗
55. 10.1002/smll.20050025210.1002/smll.200500252 ↗
56. 10.1002/adma.20200351110.1002/adma.202003511 ↗
57. 10.1021/acs.jpcb.9b0755510.1021/acs.jpcb.9b07555 ↗
58. 10.1126/science.aam975610.1126/science.aam9756 ↗
59. 10.1021/nl400237p10.1021/nl400237p ↗
60. 10.1371/journal.pone.019128910.1371/journal.pone.0191289 ↗
61. 10.1016/j.mee.2011.03.01110.1016/j.mee.2011.03.011 ↗
62. 10.1146/annurev.ph.46.030184.00232310.1146/annurev.ph.46.030184.002323 ↗
63. 10.1038/366324a010.1038/366324a0 ↗
64. 10.1002/adma.20170577610.1002/adma.201705776 ↗
65. 10.1002/smll.20180114710.1002/smll.201801147 ↗
66. 10.1021/acs.chemrev.7b0015310.1021/acs.chemrev.7b00153 ↗
67. 10.1039/C4CS00164H10.1039/C4CS00164H ↗
68. 10.1002/anie.20181455210.1002/anie.201814552 ↗
69. 10.1002/mabi.20210009010.1002/mabi.202100090 ↗
70. 10.1002/bip.2341210.1002/bip.23412 ↗
71. 10.1088/1361-6439/ab673d10.1088/1361-6439/ab673d ↗
72. Woolard D. L. · 2005 · 18010.1117/12.601029 ↗
73. 10.3389/fmicb.2019.0207810.3389/fmicb.2019.02078 ↗
74. 10.1186/s12951-021-00868-710.1186/s12951-021-00868-7 ↗
75. 10.1073/pnas.060451710310.1073/pnas.0604517103 ↗
76. 10.1529/biophysj.108.13441110.1529/biophysj.108.134411 ↗
77. 10.1073/pnas.100488010710.1073/pnas.1004880107 ↗
78. 10.1073/pnas.141055111110.1073/pnas.1410551111 ↗
79. 10.1039/b816647a10.1039/b816647a ↗
80. 10.1074/jbc.M113.49852710.1074/jbc.M113.498527 ↗
81. 10.1038/nnano.2014.23610.1038/nnano.2014.236 ↗
82. 10.1039/C5RA28092C10.1039/C5RA28092C ↗
83. 10.1039/C7CP03651E10.1039/C7CP03651E ↗
84. 10.1038/nature0366110.1038/nature03661 ↗
85. 10.1002/ijch.20140002510.1002/ijch.201400025 ↗
86. 10.1002/adfm.20140111110.1002/adfm.201401111 ↗
87. 10.1109/TADVP.2005.85830210.1109/TADVP.2005.858302 ↗
88. 10.1021/acs.chemrev.8b0062910.1021/acs.chemrev.8b00629 ↗
89. 10.1038/s41392-021-00727-910.1038/s41392-021-00727-9 ↗
90. 10.3390/molecules2608228710.3390/molecules26082287 ↗
91. 10.1038/s41570-021-00251-y10.1038/s41570-021-00251-y ↗
92. 10.1007/978-1-4613-0885-0_310.1007/978-1-4613-0885-0_3 ↗
93. 10.1147/rd.411.000310.1147/rd.411.0003 ↗
94. 10.1116/1.279404810.1116/1.2794048 ↗
95. 10.1002/app.1106010.1002/app.11060 ↗
96. 10.3390/polym1101016910.3390/polym11010169 ↗
97. 10.1002/pol.1980.13018090610.1002/pol.1980.130180906 ↗
98. 10.1002/pol.1982.17020060510.1002/pol.1982.170200605 ↗
99. 10.1002/macp.1989.02190091010.1002/macp.1989.021900910 ↗
100. Water soluble negative‐working photoresist composition – EP1084165B1 | PatentGuru https://www.patentguru.com/EP1084165B1(accessed: October 2021).