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journal article·2022-07Open access

A Resonant Graphene NEMS Vibrometer

Daniel Moreno‐Garcia, Xuge Fan, Anderson D. Smith, Max C. Lemme, Vincenzo Messina, Cristina Martin‐Olmos, Frank Niklaus, Luis Guillermo Villanueva

Small· Volume 18· Issue 28
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Abstract

Abstract Measuring vibrations is essential to ensuring building structural safety and machine stability. Predictive maintenance is a central internet of things (IoT) application within the new industrial revolution, where sustainability and performance increase over time are going to be paramount. To reduce the footprint and cost of vibration sensors while improving their performance, new sensor concepts are needed. Here, double‐layer graphene membranes are utilized with a suspended silicon proof demonstrating their operation as resonant vibration sensors that show outstanding performance for a given footprint and proof mass. The unveiled sensing effect is based on resonant transduction and has important implications for experimental studies involving thin nano and micro mechanical resonators that are excited by an external shaker.
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Research context

Nanomaterials

OpenAlex topics: Advanced MEMS and NEMS Technologies · Mechanical and Optical Resonators · Acoustic Wave Resonator Technologies

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Advanced NEMS Group École Polytechnique Féderale de Lausanne (EPFL) Lausanne 1015 Switzerland

Division of Micro and Nanosystems School of Electrical Engineering and Computer Science KTH Royal Institute of Technology Stockholm SE‐10044 Sweden

Adv. Research Institute of Multidisciplinary Sciences Beijing Institute of Technology Beijing 100081 China

Department of Electrical Engineering Chalmers University of Technology Gothenburg 41296 Sweden

Chair of Electronic Devices Faculty of Electrical Engineering and Information Tech RWTH Aachen University 52074 Aachen Germany

Swiss Integrative Center for Human Health (SICHH) Fribourg 1700 Switzerland

Funding

National Natural Science Foundation of China

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