Air Stable p-Doping of WSe₂ by Covalent Functionalization

Covalent functionalization of transition metal dichalcogenides (TMDCs) is investigated for air-stable chemical doping. Specifically, p-doping of WSe(2) via NOx chemisorption at 150 °C is explored, with the hole concentration tuned by reaction time. Synchrotron based soft X-ray absorption spectroscopy (XAS) and X-ray photoelectron spectroscopy (XPS) depict the formation of various WSe(2-x-y)O(x)N(y) species both on the surface and interface between layers upon chemisorption reaction. Ab initio simulations corroborate our spectroscopy results in identifying the energetically favorable complexes, and predicting WSe(2):NO at the Se vacancy sites as the predominant dopant species. A maximum hole concentration of ∼ 10(19) cm(-3) is obtained from XPS and electrical measurements, which is found to be independent of WSe(2) thickness. This degenerate doping level facilitates 5 orders of magnitude reduction in contact resistance between Pd, a common p-type contact metal, and WSe(2). More generally, the work presents a platform for manipulating the electrical properties and band structure of TMDCs using covalent functionalization.