Charging effect induced by electron beam irradiation: a review

Z.J. Ding; Chao Li; Bo Da; Jiangwei Liu

doi:10.1080/14686996.2021.1976597

journal article·2021-12-31Open access

Charging effect induced by electron beam irradiation: a review

Z.J. Ding, Chao Li, Bo Da, Jiangwei Liu

Science and Technology of Advanced Materials· Volume 22· Issue 1

Publisher page Open full text

Source abstract

Abstract

Charging effect frequently occurs when characterizing nonconductive materials using electrons as probes and/or signals and can impede the acquisition of useful information about the material under investigation. It is not adequate to investigate it merely by experiments, but theoretical investigations, for which the Monte Carlo method is a suitable tool, are also necessary. In this paper we review Monte Carlo simulations and selected experiments, intending to provide general insight into the charging effects induced by electron beam irradiation. We will introduce categories of the charging effect, the theoretical framework that is adopted in Monte Carlo modeling of the charging effect and present some typical simulation results. At last, with the knowledge on charging effect imparted by the above contents, we will discuss the measures that can be used for minimizing it.

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Research context

OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Integrated Circuits and Semiconductor Failure Analysis · Semiconductor materials and devices

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Department of Physics and Hefei National Laboratory for Physical Sciences at Microscale, University of Science and Technology of China, Hefei, People’s Republic of China

Research and Services Division of Materials Data and Integrated System, National Institute for Materials Science, Tsukuba, Japan

Research Center for Advanced Measurement and Characterization, National Institute for Materials Science, Tsukuba, Japan

Research Center for Functional Materials, National Institute for Materials Science, Tsukuba, Japan

Funding

National Key Research and Development Project · Education Ministry through ‘111 Project 2.0’ · JSPS KAKENHI · Basic Science Research Projects from The Sumitomo Foundation

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