MEMS vibrational energy harvesters
Source abstract
Abstract
In this paper, we look into the fundamental mechanism to retrieve the power from physical vibrations by using microelectromechanical systems (MEMS) energy harvesters. An analytical model is presented for the velocity-damped resonant generator (VDRG) that delivers electrical power through the power enhancement mechanism using the mechanical resonance of a suspended mass. Deliverable power is also analytically discussed with respect to the theoretical limit, and a view to understand the VDRG behaviors is presented in association with the impedance matching condition and the quality factors. Mechano-electric power conversions including electrostatic induction, electromagnetic induction, and piezoelectric effect are discussed to study the scaling effect. Recent examples of MEMS VDRGs are reviewed and evaluated in terms of the power density.
Source: openalex_inverted_index · Quality: baseline
Research context
OpenAlex topics: Innovative Energy Harvesting Technologies · Energy Harvesting in Wireless Networks · Advanced Sensor and Energy Harvesting Materials
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Research Center for Advanced Science and Technology, The University of Tokyo, Tokyo, Japan
Department of Electronic and Electrical Engineering, Ewha Womans University, Seoul, Korea
Advanced Research Laboratories, Tokyo City University, Tokyo, Japan
Funding
Japan Science and Technology Agency · Ministry of Science, ICT and Future Planning
References (73)
Show source-provided references
1. Jan AG · 1991
2. 10.1007/s00542-018-3763-z10.1007/s00542-018-3763-z ↗
3. 10.1109/JMEMS.2014.234989410.1109/JMEMS.2014.2349894 ↗
4. ZigBee Wireless Networking Overview (Rev. D). Texas Instruments Inc. [cited 2018 Aug 9]. Available from: http://www.tij.co.jp/ja-jp/wireless-connectivity/simplelink-solutions/zigbee/technical-documents.html.
5. Apple Watch Series 3 Battery Information. Apple Inc. [cited 2018 Aug 9]. Available from: https://www.apple.com/watch/battery.html.
6. Bluetooth Low Energy. Lapis Semiconductor Co. Ltd. [cited 2018 Aug 9]. Available from: http://www.lapis-semi.com/en/semicon/telecom/ble.html.
7. GPS Tracker XY4+. XY - The Findables Company. [cited 2018 Aug 9]. Available from: https://v12.getxyfindit.io/offer-01/.
8. Felica card reader. Nocoly Inc. [cited 2018 Aug 9]. Available from: https://www.nocoly.co/.
9. Hearing aid, Advisa MRI (A3DR01). Medtronic PLC. [cited 2018 Aug 9]. Available from: http://www.medtronic.com/.
10. Clock LSI. SEIKO NPC Corp. [cited 2018 Aug 9]. Available from: http://www.npc.co.jp/product/clock/.
11. Timer IC TPL5010/TPL5110. Texas Instruments Inc. [cited 2018 Aug 9]. Available from: http://www.tij.co.jp/product/jp/TPL5110-Q1.
12. 10.1088/0957-0233/19/12/12520210.1088/0957-0233/19/12/125202 ↗
13. 10.1109/JSSC.2014.233195310.1109/JSSC.2014.2331953 ↗
14. 10.1080/14686996.2018.144820010.1080/14686996.2018.1448200 ↗
15. 10.1088/0960-1317/18/10/10401110.1088/0960-1317/18/10/104011 ↗
16. Suzuki Y · IEEJ Trans · 2011 · 6 · 101
17. 10.1109/JPROC.2008.92749410.1109/JPROC.2008.927494 ↗
18. Rao SS · 1995
19. 10.1063/1.494352810.1063/1.4943528 ↗
20. 10.1088/0960-1317/20/10/10400210.1088/0960-1317/20/10/104002 ↗
21. 10.1080/14686996.2018.147739510.1080/14686996.2018.1477395 ↗
22. Qianyan F · J Phys · 2013 · 476 · 012112.
23. 10.1109/JMEMS.2018.279268610.1109/JMEMS.2018.2792686 ↗
24. 10.1088/1361-6439/aac8cc10.1088/1361-6439/aac8cc ↗
25. 10.1088/1361-6439/aab51410.1088/1361-6439/aab514 ↗
26. 10.1049/ip-cds:2001052510.1049/ip-cds:20010525 ↗
27. 10.1088/0960-1317/17/7/00710.1088/0960-1317/17/7/007 ↗
28. 10.1080/14686996.2018.147132110.1080/14686996.2018.1471321 ↗
29. 10.1063/1.500727210.1063/1.5007272 ↗
30. Galchev T · J Microelectromech Syst · 2011 · 20 · 852
31. 10.1016/j.sna.2016.08.00810.1016/j.sna.2016.08.008 ↗
32. 10.1088/0960-1317/19/9/09400810.1088/0960-1317/19/9/094008 ↗
33. 10.3390/mi810028810.3390/mi8100288 ↗
34. 10.1016/S0924-4247(03)00068-210.1016/S0924-4247(03)00068-2 ↗
35. 10.1088/1468-6996/16/4/04600110.1088/1468-6996/16/4/046001 ↗
36. 10.1088/0964-1726/22/8/08501710.1088/0964-1726/22/8/085017 ↗
37. 10.1016/S0888-3270(03)00081-510.1016/S0888-3270(03)00081-5 ↗
38. 10.1088/0964-1726/15/5/00710.1088/0964-1726/15/5/007 ↗
39. Smart material product datasheet. Smart Material Corp. [cited 2018 Aug 8]. Available from: http://www.smart-material.com/.
40. 10.1109/JMEMS.2012.221306910.1109/JMEMS.2012.2213069 ↗
41. 10.1117/12.15276610.1117/12.152766 ↗
42. 10.1117/12.38817510.1117/12.388175 ↗
43. 10.1109/JMEMS.2010.206743110.1109/JMEMS.2010.2067431 ↗
44. 10.1109/TRANSDUCERS.2011.596985710.1109/TRANSDUCERS.2011.5969857 ↗
45. 10.1088/0960-1317/20/10/10502310.1088/0960-1317/20/10/105023 ↗
46. 10.1080/14686996.2018.150898510.1080/14686996.2018.1508985 ↗
47. 10.1109/SENSOR.2009.528564810.1109/SENSOR.2009.5285648 ↗
48. 10.1088/0964-1726/18/3/03500110.1088/0964-1726/18/3/035001 ↗
49. 10.1016/j.apenergy.2018.01.07610.1016/j.apenergy.2018.01.076 ↗
50. 10.1088/0960-1317/24/6/06502210.1088/0960-1317/24/6/065022 ↗
51. 10.1088/0960-1317/25/10/10401410.1088/0960-1317/25/10/104014 ↗
52. 10.1016/j.apenergy.2017.12.05310.1016/j.apenergy.2017.12.053 ↗
53. 10.1063/1.495888410.1063/1.4958884 ↗
54. 10.1016/j.sna.2014.02.02710.1016/j.sna.2014.02.027 ↗
55. 10.1088/0960-1317/24/3/03500110.1088/0960-1317/24/3/035001 ↗
56. 10.1088/0960-1317/23/1/01501210.1088/0960-1317/23/1/015012 ↗
57. 10.1016/j.sna.2015.02.02110.1016/j.sna.2015.02.021 ↗
58. 10.1088/0960-1317/23/11/11401010.1088/0960-1317/23/11/114010 ↗
59. 10.1088/0960-1317/20/6/06501710.1088/0960-1317/20/6/065017 ↗
60. 10.3390/mi810029310.3390/mi8100293 ↗
61. 10.1016/j.sna.2010.07.01310.1016/j.sna.2010.07.013 ↗
62. 10.1016/j.sna.2011.09.01310.1016/j.sna.2011.09.013 ↗
63. 10.1016/j.sna.2012.05.00910.1016/j.sna.2012.05.009 ↗
64. 10.1007/s00542-010-1059-z10.1007/s00542-010-1059-z ↗
65. 10.1007/s00542-009-0827-010.1007/s00542-009-0827-0 ↗
66. 10.1109/TMAG.2010.204475710.1109/TMAG.2010.2044757 ↗
67. 10.1109/JMEMS.2011.216248810.1109/JMEMS.2011.2162488 ↗
68. 10.1109/JMEMS.2017.272882110.1109/JMEMS.2017.2728821 ↗
69. Durou H · 2010 · 27
70. 10.1016/j.sna.2010.06.02810.1016/j.sna.2010.06.028 ↗
71. 10.1007/s00542-012-1424-110.1007/s00542-012-1424-1 ↗
72. 10.1088/0964-1726/20/12/12501110.1088/0964-1726/20/12/125011 ↗
73. 10.3390/proceedings104058510.3390/proceedings1040585 ↗