Attempt to Detect Nano Oil Film on the Surface of Polished KDP Crystal
Source abstract
Abstract
Abstract—The KDP (Potassium Dihydrogen Phosphate) crystal is important in high-energy optical system as a high quality non-linear optical material. The residual oil film which even is of nanometer thickness has great adverse effect on the KDP optical performance, such as laser absorption and damage threshold. In this paper, spectroscopic imaging ellipsometry (SIE) is applied to investigate the residual oil film on KDP crystal surface during the processing, and atomic force microscopy (AFM) is applied as a reference of the SIE results. Two modes of SIE are applied to detect oil film thickness. A rotating substrate measurement scheme is proposed because KDP crystal is a uniaxial anisotropic material. An optical model with thin oil film and KDP substrate is built including a top surface roughness layer, a flat oil film layer and KDP substrate, which is used to fit the detection data. Then, the single-point measurement results and thickness maps of residual oil film are established to describe the oil film distribution quantitatively. The AM-FM mode of AFM is applied to detect the oil film distribution on KDP crystal after surface cleaning, and the oil film thickness established in AFM measurement corresponds well with the SIE results. The nano oil film on KDP crystal can be measured by SIE technology accurately and the measurement scheme can also provide a reference for the similar detection.
Source: openalex_inverted_index · Quality: baseline
Research context
OpenAlex topics: Analytical Chemistry and Sensors · Electrohydrodynamics and Fluid Dynamics · Force Microscopy Techniques and Applications
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (32)
Show source-provided references
1. Painsner, J.A., Boyes, J.D., and Kuopen, S.A., National ignition facility, Laser Focus World, 1994, vol. 30, no. 5, p. 75.
2. Deng, L. et al., Study on mechanics and key technologies of laser nondestructive mirror-separation for KDP crystal, Int. J. Mac. Tools Manuf., 2015, vol. 94, pp. 26–36.10.1016/j.ijmachtools.2015.04.001 ↗
3. Wang, X. et al., A water dissolution method for removing micro-waviness caused by SPDT process on KDP crystals, Int. J. Adv. Manuf. Technol., 2016, vol. 85, nos. 5–8, pp. 1347–1360.10.1007/s00170-015-8019-9 ↗
4. Spaeth, M.L. et al., National ignition facility wave front requirements and optical architecture, Opt. Eng., 2004, vol. 43, no. 12, pp. 2854–2865.10.1117/1.1815332 ↗
5. Chen, H. et al., Effect of crystallographic orientation on cutting forces and surface finish in ductile cutting of KDP crystals, Mach. Sci. Technol., 2011, vol. 15, no. 2, pp. 231–242.10.1080/10910344.2011.580701 ↗
6. Chen, S. et al., Research of polishing process to control the iron contamination on the magnetorheological finished KDP crystal surface, Appl. Opt., 2015, vol. 54, no. 6, pp. 1478–1484.10.1364/AO.54.001478 ↗
7. Peng, X. et al., Novel magnetorheological figuring of KDP crystal, Chin. Opt. Lett., 2011, vol. 9, no. 10, p. 102201.10.3788/COL201109.102201 ↗
8. Kosarieh, S., Morina, A., and Laine, E., Tribological performance and tribochemical processes in a DLC/steel system when lubricated in a fully formulated oil and base oil, Surf. Coat. Technol., 2013, vol. 217, pp. 1–12.10.1016/j.surfcoat.2012.11.065 ↗
9. Pu, C., Design and Development of Automatic Oil Film Analyzer for Tin Plate, Shanghai Jiao Tong Univ., 2011.
10. Nečas, D. et al., Assessment of non-uniform thin films using spectroscopic ellipsometry and imaging spectroscopic reflectometry, Thin Solid Films, 2014, vol. 571, pp. 573–578.10.1016/j.tsf.2013.12.036 ↗
11. Dahal, L.R., et al., Applications of real-time and mapping spectroscopic ellipsometry for process development and optimization in hydrogenated silicon thin-film photovoltaics technology, Sol. Energy Mater. Sol. Cells, 2014, vol. 129, pp. 32–56.10.1016/j.solmat.2014.01.028 ↗
12. Kim, K. et al., Volumetric thin film thickness measurement using spectroscopic imaging reflectometer and compensation of reflectance modeling error, Int. J. Prec. Eng. Manuf., 2014, vol. 15, no. 9, pp. 1817–1822.10.1007/s12541-014-0534-3 ↗
13. Nečas, D. et al., Measurement of thickness distribution, optical constants, and roughness parameters of rough nonuniform ZnSe thin films, Appl. Opt., 2014, vol. 53, no. 25, pp. 5606–5614.10.1364/AO.53.005606 ↗
14. Yasaka, M., X-ray thin-film measurement techniques, The Rigaku J., 2010, vol. 26, no. 2.
15. Nemes-Incze, P. et al., Anomalies in thickness measurements of graphene and few layer graphite crystals by tapping mode atomic force microscopy, Carbon, 2008, vol. 46, no. 11, pp. 1435–1442.10.1016/j.carbon.2008.06.022 ↗
16. Fujiwara, H., Spectroscopic Ellipsometry: Principles and Application, John Wiley & Sons Ltd., 2007.10.1002/9780470060193 ↗
17. Jaiswal, J. et al., Determination of optical constants including surface characteristics of optically thick nanostructured Ti films: analyzed by spectroscopic ellipsometry, Appl. Opt., 2016, vol. 55, no. 29, pp. 8368–8375.10.1364/AO.55.008368 ↗
18. Asinovski, L., Beaglehole, D., and Clarkson, M.T., Imaging ellipsometry: quantitative analysis, Appl. Mater. Sci., 2008, vol. 205, no. 4, pp. 764–771.
19. Matković, A. et al., Spectroscopic imaging ellipsometry and Fano resonance modeling of graphene, J. Appl. Phys., 2012, vol. 112, no. 12, p. 123523.10.1063/1.4771875 ↗
20. Nielsen, M.M.B. and Simonsen, A.C., Imaging ellipsometry of spin-coated membranes: mapping of multilamellar films, hydrated membranes, and fluid domains, Langmuir, 2013, vol. 29, no. 5, pp. 1525–1532.10.1021/la3046675 ↗
21. Azzam, R.M.A. and Bashara, N.M., Ellipsometry and Polarized Light, Elsevier Science Publishing Co., Inc., 1987.10.1016/S0003-2670(00)82849-4 ↗
22. Ogieglo, W., Woemeester, H., and Wessling, M., Spectroscopic ellipsometry analysis of a thin film composite membrane consisting of polysulfone on a porous α-alumina support, ACS Appl. Mater. Interfaces, 2012, vol. 4, no. 2, pp. 935–943.10.1021/am2015958 ↗
23. Guan, L. et al., Spectroscopic imaging ellipsometry for thin film detection on uniaxial crystal, in Fifth Int. Conf. Opt. Photonics Eng., Int. Soc. Opt. Photonics, 2017, pp. 1044921–1044921-8.10.1117/12.2270796 ↗
24. Schubert, M., Polarization-dependent optical parameters of arbitrarily anisotropic homogeneous layered systems, Phys. Rev. B, 1996, vol. 53, no. 8, p. 4265.10.1103/PhysRevB.53.4265 ↗
25. Kelly, P.N., Designing Optical Metamaterials with Hyperbolic Dispersion Based on Al/Dielectric Nanolayered Structures, San Diego State Univ., 2016.
26. Kurtaran, S. and Akyuz, F., Evaluation of optical parameters and characterization of ultrasonically sprayed MgO films by spectroscopic ellipsometry, Appl. Surf. Sci., 2013, vol. 265, pp. 709–713.10.1016/j.apsusc.2012.11.089 ↗
27. Wurstbauer, U. et al., Imaging ellipsometry of graphene, Appl. Phys. Lett., 2010, vol. 97, no. 23, p. 231901.10.1063/1.3524226 ↗
28. Matković, A. et al., Spectroscopic imaging ellipsometry and Fano resonance modeling of graphene, J. Appl. Phys., 2012, vol. 112, no. 12, p. 123523.10.1063/1.4771875 ↗
29. Loizou, C.P. et al., Multiscale amplitude-modulation frequency-modulation (AM–FM) texture analysis of ultrasound images of the intima and media layers of the carotid artery, IEEE Trans. Inf. Technol. Biomed., 2011, vol. 15, no. 2, pp. 178–188.10.1109/TITB.2010.2081995 ↗
30. Garcia, R. and Proksch, R., Nanomechanical mapping of soft matter by bimodal force microscopy, Eur. Polym. J., 2013, vol. 49, no. 8, pp. 1897–1906.10.1016/j.eurpolymj.2013.03.037 ↗
31. Bouchikhi, A. and Boudraa, A.O., Multicomponent AM–FM signals analysis based on EMD–B-splines ESA, Signal Process., 2012, vol. 92, no. 9, pp. 2214–2228.10.1016/j.sigpro.2012.02.014 ↗
32. Nguyen, H.K., Ito, M., and Nakajima, K., Elastic and viscoelastic characterization of inhomogeneous polymers by bimodal atomic force microscopy, Jpn. J. Appl. Phys., 2016, vol. 55(8S1), p. 08NB06.10.7567/JJAP.55.08NB06 ↗