A facility for measuring the thickness of thin metal films
Source abstract
Abstract
A facility is described for measuring the thickness of a thin metal film. A measurement method is proposed that is based on the dependence of the phase velocity of harmonic antisymmetric Lamb waves that propagate along the film on the film thickness. A continuous method for excitation of acoustic waves has been applied to velocity measurements. It makes it possible to eliminate the effect of dispersion of the Lamb-wave velocity on the measurement accuracy.
Source: openalex_inverted_index · Quality: baseline
Research context
OpenAlex topics: Acoustic Wave Resonator Technologies · Surface Roughness and Optical Measurements · Advanced Measurement and Metrology Techniques
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References (5)
Show source-provided references
1. Korolev, M.V., Ekhoimpul’snye tolshchinomery (Echo-Pulse Thickness Gages), Moscow: Mashinostroenie, 1980.
2. Gotra, Z.Yu., Kontrol’ tekhnologii gibridnykh integral’nykh skhem (Inspection of Manufacturing of Hybrid Integrated Circuits), Lvov, 1981.
3. Maissel, L.I. and Glang, R., Handbook of Thin Film Technology, New York: McGraw-Hill, 1970.
4. Viktorov, I.A., Fizicheskie osnovy primeneniya ul’trazvukovykh voln Releya i Lemba v tekhnike (Physical Principles of Technical Applications of Ultrasonic Rayleigh and Lamb Waves), Moscow: Nauka, 1966.
5. Tolipov, Kh.B. and Kleshchev, D.G., RF Patent 2016100979, 2016.