A Nondestructive Technique for Local Measurement of Dielectric Loss in Substrates of Integrated Circuits at Microwaves
Source abstract
Abstract
A device for nondestructive measurements of dielectric loss in substrates of integrated circuits and film materials in a local 2-mm-diameter zone has been developed. The main element of the device is a coaxial resonator with a measurement hole at its end and a clamp for dielectric substrates in the form of a cylindrical waveguide that is evanescent for measurement frequencies. In such a system, emission of electromagnetic waves from the measurement hole is absent, although the phenomenon of emission is characteristic of a coaxial resonator with a hole to which a dielectric is applied. The absence of radiation loss simplifies the determination of the loss tangent for dielectric substrates. A formula for calculations and a measurement technique in the range of 10 GHz are presented.
Source: openaire · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: Microwave and Dielectric Measurement Techniques · Microwave Engineering and Waveguides · Electromagnetic Compatibility and Noise Suppression
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References (10)
Show source-provided references
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