An instrument for simultaneous visual and thermal testing of microelectronic devices
Source abstract
Abstract
The problem of simultaneous visual and thermal testing of microobjects is considered. For this purpose, a mirror–lens optical system is proposed and constructed. The system has no movable elements and provides identical scales of images in spectral ranges of 0.4–0.8 and 8–14 μm. The technique for calculating its dimensions and an experimental setup on the basis of this scheme are described. The results of its testing using an example of investigating microelectronic devices are presented.
Source: openalex_inverted_index · Quality: baseline
Research context
OpenAlex topics: Industrial Vision Systems and Defect Detection · Thermography and Photoacoustic Techniques · Manufacturing Process and Optimization
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (10)
Show source-provided references
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