article·2011-06-01

INVESTIGATION ON THE ELECTRICAL CONTACT BEHAVIORS OF RF MEMS SWITCHES USING NANO-INDENTER

Dong‐Seok Kim, Seung-Deok Ko, Seungjun Lee, Byung-Kee Lee, Jun‐Bo Yoon, Do Kyung Kim

Abstract

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Research context

OpenAlex topics: Photonic and Optical Devices · Advanced MEMS and NEMS Technologies · Microwave Engineering and Waveguides

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