Tribological investigation of multilayer CrN/CrCN/TaN films deposited by close field unbalanced magnettron sputtering
Source abstract
Abstract
Abstract CrN/CrCN/TaN multilayer films were deposited onto the CoCrMo alloy substrates at different number layers as two, four and 8 layers by close-field unbalanced magnetron sputtering method. Microstructure and the tribo-logical properties of the films were characterized by XRD, SEM, pin-on-disk wear test, scratch test, micro hardness. CrN/CrCN/TaN multilayer coatings exhibited good adhesion properties on the CoCrMo alloy substrate. A very high hardness value of 60 GPa was obtained for 8 multilayered coating. As a result of the pin-on-disc wear tests, it was found that the tribological properties of the CoCrMo alloy were enhanced by coating its surface with this architecture by using close-field unbalanced magnetron system with used parameters.
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Research context
OpenAlex topics: Metal and Thin Film Mechanics · Diamond and Carbon-based Materials Research · Tribology and Wear Analysis
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Inonu University, Faculty of Engineering, Turkey
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