Nanocrystalline graphite thin layers for low-strain, high-sensitivity piezoresistive sensing
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Abstract
Abstract Bulk nanocrystalline graphite has been investigated as a possible candidate for piezoresistive sensors. The thin films were grown using capacitively coupled plasma enhanced chemical vapor deposition and a technological workflow for the transfer of the active material onto flexible substrates was established in order to use the material as a piezoresitive element. Preliminary electrical measurements under mechanical strain were performed in order to test the piezoresistive response of the material and promising GF values of 50 − 250 at 1% strain were obtained.
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Research context
OpenAlex topics: Advanced Sensor and Energy Harvesting Materials · Nanowire Synthesis and Applications · Gas Sensing Nanomaterials and Sensors
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Affiliations
National Institute for Research and Development in Microtechnologies -IMT Bucharest , 126A Erou Iancu Nicolae Street, Voluntari city, Ilfov county, 077190 , Romania ; Faculty of Physics , University of Bucharest , 405 Atomistilor Street, Magurele city, Ilfov county, 077125 , Romania
National Institute for Research and Development in Microtechnologies - IMT Bucharest , 126A Erou Iancu Nicolae Street , Voluntari city , Ilfov county, 077190 , Romania
National Institute for Laser, Plasma and Radiation Physics , 409 Atomistilor Street , Magurele city , Ilfov county, 077125 , Romania ; Faculty of Physics , University of Bucharest , 405 Atomistilor Street, Magurele city, Ilfov county, 077125 , Romania
References (41)
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