DataVXResearch in Nondestructive EvaluationPaper
journal article·1993-03

Silicon Sensors as Process Monitoring Devices

Patricia A. Beck, Bert A. Auld, Ki-Soo Kim

Research in Nondestructive Evaluation· Volume 5· Issue 2
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Source abstract

Abstract

Abstract Piezoresistive silicon based process monitoring devices (PMDs) employing flexible circuitry and substrates have been developed which are compatible with standard VLSI fabrication processes. These solid state sensors offer cost effective batch fabrication and a high degree of uniformity to produce either single elements or flexible conformable arrays. This is a state of the art report on emerging technology.
Source: openalex_inverted_index · Quality: baseline

Research context

OpenAlex topics: Advanced MEMS and NEMS Technologies · Advanced Surface Polishing Techniques · 3D IC and TSV technologies

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

References (29)

Show source-provided references
1. 10.1177/00219983830170020410.1177/002199838301700204 ↗
2. Miller A. · 1987
3. Middelhoek, S. and Audet, S. A. 1989.Silicon Sensors, 107–123. New York: Academic Press.
4. Herring C. · Bell Sys. Tech. Journal · 1955 · 34 · 23710.1002/j.1538-7305.1955.tb01472.x ↗
5. 10.1063/1.172828010.1063/1.1728280 ↗
6. 10.1103/PhysRev.94.4210.1103/PhysRev.94.42 ↗
7. 10.1063/1.172952410.1063/1.1729524 ↗
8. 10.1109/T-ED.1978.1925010.1109/T-ED.1978.19250 ↗
9. 10.1109/T-ED.1978.1924910.1109/T-ED.1978.19249 ↗
10. 10.1149/1.213425710.1149/1.2134257 ↗
11. 10.1063/1.193116410.1063/1.1931164 ↗
12. 10.1109/T-ED.1979.1979210.1109/T-ED.1979.19792 ↗
13. 10.1063/1.170260510.1063/1.1702605 ↗
14. Kittel, C. 1966.Introduction to Solid State Physics,, 3rd ed., 277–279. New York: Wiley.
15. Op. cit. Herring.
16. Op. cit. Pfann and Thurston.
17. Op. cit. S. Middelhoek and S.A. Audet.
18. Nye J. F. · 1985
19. Op. cit. Pfann and Thurston.
20. Timoshenko S. · 1959
21. Op. cit. Tufte, Chapman and Long.
22. Barth P. W. · Proc. IEEE IEDEM · 1984 · 217
23. 10.1177/00219983870210030410.1177/002199838702100304 ↗
24. Unpublished data of Ki Soo Kim
25. 178 Op. cit. Grove
26. Oki, A. K. and Muller, R. S. 1986. “Integrated Polysilicon Tactile Sensors,”. Proc. IEEE Solid State Sensors Workshop, Hilton Head. 1986.
27. Guckel, H. 1986. “Design and Construction Techniques for Planar Polysilicon Pressure Transducers with Piezoresistive Read-out,”. Proc. IEEE Solid State Sensors Workshop, Hilton Head. 1986.
28. Stanford University. Private Communication, Olav Solgaard
29. 263ff Op. cit. Grove