Local piezoelectric response of ZnO nanoparticles embedded in a photosensitive polymer
Source abstract
Abstract
Abstract Local piezoelectric properties of ZnO nanoparticles (NPs) embedded in a photo‐epoxy polymer are investigated by piezoresponse force microscopy (PFM). Integrating ZnO NPs into a photosensitive SU‐8 polymer matrix not only retains the highly desired piezoelectric properties of the ZnO, but also preserves photosensitivity and optical transparency of the SU‐8 polymer. These results have strong implications for simple photolithography based low‐cost fabrication of piezoelectric microelectromechanicalsystems (MEMS) and nanoelectromechanicalsystems (NEMS) in both sensing and energy harvesting applications. (© 2012 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)
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Research context
OpenAlex topics: Advanced Sensor and Energy Harvesting Materials · Acoustic Wave Resonator Technologies · Mechanical and Optical Resonators
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