Toward quantitative low-energy ion scattering on CaSiO 3 from comparison to multiple-scattering-resolved dynamical binary collision approximation simulations

We perform Low-energy Ion Scattering with He ions ranging in energy from 1 keV to 3 keV on {CaSiO}₃ using a commercial electrostatic detector system and determine the charge fraction of scattered ions from comparison with binary collision approximation simulations. The simulations take composition changes due to surface cleaning Xe sputtering into account. Scattered He particles are separated in the simulation into single, dual, and multiple scattering trajectories. We find that the charge fraction of single and dual scattered He is about ten times higher than the one for multiple collisions. Our results show that the charge fraction of scattered He can be reliably extracted for different scattering regimes and that for a given He incidence energy, the entire scattered He spectrum can be modeled with only few constant parameters.