Few-Layer MoS2 on a SiO2/Si Wafer through Sulfurization Chemical Vapor Deposition with a Vaporization-Shadowing Effect
Source abstract
Abstract
This study aimed to synthesize few-layer MoS 2 on SiO 2 /Si using sulfurization chemical vapor deposition toward beyond-5G and 6G communication. Fabric-like MoO 3 (s) was directly placed onto a SiO 2 /Si substrate to lower the oxygen potential, which is achieved through a shadowing effect on vaporization. Successful results were achieved, yielding MoS 2 thin films with a coverage of more than 74% and a crystal size in the range of 50 to 600 μm. Two distinct pathways for MoS 2 (s) formation from MoO 3 (s) via MoO 2 (s) and MoS 3 (s) were also uncovered. The shadowing effect of MoO 3 (s) vaporization facilitated the two-dimensional growth of MoS 2 by mitigating oxygen partial pressure. Therefore, sulfurization chemical vapor deposition shows great application potential in synthesizing high-quality MoS 2 thin films with substantial crystal size and coverage, making them suitable for next-generation communication devices.
Source: openalex_inverted_index · Quality: baseline
Research context
OpenAlex topics: 2D Materials and Applications · MXene and MAX Phase Materials · Perovskite Materials and Applications
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Department of Chemical Systems Engineering, Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan
Institute of Innovation for Future Society, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan
Department of International Collaborative Program in Sustainable Materials and Technology for Industries between Nagoya University and Chulalongkorn University, Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan
Conjoint Research Laboratory in Nagoya University, Shinshu University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan
Funding
New Energy and Industrial Technology Development Organization · China Scholarship Council
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