Design, fabrication, and characterization of Mach–Zehnder interferometers
Source abstract
Abstract
Abstract In this paper, the effects of physical parameters on the performance of unbalanced Mach–Zehnder interferometers (MZIs) are numerically studied by solving Maxwell's equations on a cross-section of the waveguide using finite-difference eigenmode method. The MZIs are fabricated by the electron beam lithography with a single etch process on a silicon-on-insulator wafer. The transmission profiles and free spectral ranges (FSRs) of the fabricated MZIs are also measured using a custom-built automated measurement setup and compared with the simulation results of Corner analysis and Monte-Carlo analysis methods. Our comparison reveals that the measured FSRs of the fabricated MZIs are in the range determined by the Monte-Carlo analysis. While all measured FSRs are less than the FSRs indicated by the Corner analysis. Therefore, Monte-Carlo analysis can be used as an accurate numerical method for the study of photonic integrated circuits before fabrication.
Source: openaire · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: Photonic and Optical Devices · Optical Network Technologies · Semiconductor Lasers and Optical Devices
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (31)
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