In situelectric properties of Ag films deposited on rough substrates

Abstract Silver (Ag) films have been deposited on rough substrates (including frosted glass and silicone grease), and for comparison on flat glass, by DC-magnetron sputtering, and their sheet resistances measured in situ during deposition. It is found that the growth of Ag films proceeds through three distinct stages: discontinuous, semi-continuous, and continuous regimes. The sheet resistance on rough substrates jumps in the vicinity of the percolation threshold, whereas the resistance on flat substrates decreases monotonically during deposition. The abnormal in situ electric properties on rough substrates are well explained based on the differences of the growth mechanism and microstructure of Ag films on different substrates. Keywords: Ag filmselectrical resistivitysputteringthin-film growth Acknowledgments This study was supported by the National Natural Science Foundation of China (grant nos 11204283, 11074227) and by the Zhejiang Provincial Natural Science Foundation (grant nos Y6090542, R6110362).