The interface structure of polyimide guides etched by ion irradiation
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Research context
OpenAlex topics: Integrated Circuits and Semiconductor Failure Analysis · Polymer Nanocomposite Synthesis and Irradiation · Ion-surface interactions and analysis
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References (7)
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3. Brandt · 1974 · 20
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6. Kowalczyk · Phys. Rev. B · 1990 · 41 · 164510.1103/PhysRevB.41.1645 ↗
7. Merhari · J. Vac. Sci. Technol. B · 1991 · 9 · 251110.1116/1.585684 ↗