Free-standing coating patterns fabricated by ultraviolet contact lithography using photosensitive sol-gel coatings
Source abstract
Abstract
Abstract Photosensitive ZrO2-SiO2 hybrid sol-gel coatings containing large contents of chelating rings were prepared by using the zirconium n-butoxide (TBOZ) and methyltriethoxysilane (MTES) as hybrid precursors, and benzoylacetone (BZAC) as chelating agent. The change of ultraviolet (UV) absorption spectra, chemical composition, and optical properties of ZrO2-SiO2 hybrid sol-gel coatings were analyzed before and after UV exposure and calcination. The refractive index of the ZrO2-SiO2 hybrid gel coatings decreased from 1.673 to 1.561 with the increase of the molar content of MTES in precursors. The sol-gel coating patterns with the periods of 20.24 μm, 10.11 μm and 3.99 μm on the PAMS substrates were firstly obtained by using the photosensitive ZrO2-SiO2 hybrid sol-gel films as fundamental materials through a process of UV contact lithography with photo masks and etching with ethanol. Finally, the free-standing gel coating patterns supported by copper grids, with the period of 12.70 μm and line width of 4.93 μm, and the period of 14.20 μm and line width of 3.82 μm, were obtained by removing the PAMS thermal degradation sacrifice layer after being calcined at 330 °C. Micrometer-periodic free-standing gel coating patterns with different structure have potential applications in the laser physical experiments.
Source: openaire · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: Nanofabrication and Lithography Techniques · Optical Coatings and Gratings · Analytical Chemistry and Sensors
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (49)
Show source-provided references
1. Metal/multilayer-dielectric coated grating for chirped pulse amplification laser system
2. Laser-induced holographic surface relief gratings on nonlinear optical polymer films10.1063/1.113845 ↗
3. Zirconia and zirconia-ORMOSIL planar waveguides prepared at room temperature10.1021/cm960135x ↗
4. Sol-gel glass waveguide and grating on silicon10.1109/50.712247 ↗
5. Design and fabrication of a CH/Al dual-layer perturbation target for hydrodynamic instability experiments in ICF10.1007/s10894-015-0037-y ↗
6. Potential SiO2/CRF bilayer perturbation aerogel target for ICF hydrodynamic instability experiment10.1016/j.fusengdes.2011.10.007 ↗
7. Fabrication of multi-layered shock wave tube for hydrodynamic instability experiment10.1007/s10894-011-9410-7 ↗
8. Fabrication of tunable superhydrophobic surfaces by nanosphere lithography10.1021/cm034696h ↗
9. From hydrophilic to superhydrophobic: fabrication of micrometer-sized nail-head-shaped pillars in diamond10.1021/la902361c ↗
10. Recent developments in superhydrophobic surfaces with unique structural and functional properties10.1039/c2sm26517f ↗
11. Design and fabrication of a microlens array by use of a slow tool servo10.1364/OL.30.001707 ↗
12. Fabrication of large area plasmonic nanoparticle grating structure on silver halide based transmission electron microscope film and its application as a surface enhanced Raman spectroscopy substrate10.1063/1.4928326 ↗
13. Direct fabrication of microgratings in fused quartz by laser-induced plasma-assisted ablation with a KrF excimer laser10.1364/OL.23.001486 ↗
14. Fabrication of 5 nm linewidth and 14 nm pitch features by nanoimprint lithography10.1063/1.1766071 ↗
15. Lithography with a mask of block copolymer microstructures10.1116/1.589860 ↗
16. Fabrication of sub-micron period diffraction gratings in self-processing sol-gel glasses10.1016/S0040-6090(00)01813-7 ↗
17. Cost-effective fabrication of microlenses on hybrid sol-gel glass with a high-energy beam–sensitive gray-scale mask10.1364/OE.10.000303 ↗
18. Preparation of photosensitive gel films and fine patterning of amorphous Al2O3-SiO2 thin films10.1016/S0025-5408(97)00188-8 ↗
19. A review of contamination-resistant antireflective sol-gel coatings10.1007/s10971-011-2615-4 ↗
20. Laser-induced damage on ordered and amorphous sol-gel silica coatings10.1364/OME.4.002478 ↗
21. Ultraviolet laser-induced damage on fused silica substrate and its sol-gel coating10.1364/OL.37.002364 ↗
22. Sol-gel coatings on metals for corrosion protection10.1016/j.porgcoat.2008.08.010 ↗
23. Optimization of optical properties of high chiral planar waveguides obtained by sol-gel method10.1016/j.optmat.2013.12.016 ↗
24. Preparation and characterization of sol–gel derived UV-curable organo-silica–titania hybrid coatings10.1016/j.porgcoat.2007.07.010 ↗
25. Structural and surface characterization of undoped ZnO and Cu doped ZnO using sol-gel spin coating method10.1007/s10854-015-4187-5 ↗
26. Preparation and rapid analysis of antibacterial silver, copper and zinc doped sol-gel surfaces10.1016/j.colsurfb.2012.01.035 ↗
27. Sol-gel synthesis and characterization of Ag and Au nanoparticles in SiO2, TiO2, and ZrO2 thin films10.1111/j.1151-2916.2000.tb01566.x ↗
28. Optical enhancement of Au doped ZrO2 thin films by sol-gel dip coating method10.1016/j.physb.2014.10.013 ↗
29. Influence of inhibitor addition on the corrosion protection performance of sol–gel coatings on AA202410.1016/j.porgcoat.2007.12.002 ↗
30. Fabrication of Si-based waveguide splitters using photosensitive sol–gel method10.1016/j.optcom.2008.11.066 ↗
31. Fabrication, characterization and water wetting behavior of mesoscale 1D/2D periodic structured silica-zirconia sol-gel thin films10.1039/C6RA00380J ↗
32. Simple fabrication of diffraction gratings by two-beam interference method in highly photosensitive hybrid sol-gel films10.1364/OPEX.12.003947 ↗
33. Single-step fabrication of diffraction gratings on hybrid sol-gel glass using holographic interference lithography10.1016/S0030-4018(00)00976-7 ↗
34. Fabrication of two-dimensional gratings using photosensitive gel films and their characterization10.1023/A:1020780506817 ↗
35. Moving mask UV lithography for three-dimensional structuring10.1088/0960-1317/17/2/003 ↗
36. Filled microcavity arrays produced by polyelectrolyte multilayer membrane transfer10.1002/adma.200402019 ↗
37. Free-standing and bridged amine-functionalized periodic mesoporous organosilica films10.1039/c0jm01278e ↗
38. Free-standing mesoporous silica films; morphogenesis of channel and surface patterns10.1039/a702110k ↗
39. A new approach for preparation of free-standing nano-porous SiO2 films with a large area10.1007/s10971-016-4123-z ↗
40. Photosensitive gel films prepared by the chemical modification and their application to surface-relief gratings10.1016/S0040-6090(99)00082-6 ↗
41. Fabrication of two-dimensional lattices by using photosensitive sol–gel and four-beam laser interference10.1016/j.jnoncrysol.2010.11.013 ↗
42. Formation mechanism of hydrous zirconia particles produced by the hydrolysis of ZrOCl2 solutions: III, kinetics study for the nucleation and crystal-growth processes of primary particles10.1111/j.1151-2916.2001.tb01006.x ↗
43. The influence of an acid catalyst on the morphology, wettability, adhesion and chemical structure properties of TiO2 and ZrO2 sol-gel thin films10.1016/j.surfcoat.2015.11.030 ↗
44. Preparation and optical characterization of thick-film zirconia and titania ormosils10.1023/A:1008717215060 ↗
45. Homogeneous Si-Ti and Si-Ti-Zr polymeric systems obtained from monomeric precursors10.1016/S0022-3093(97)00111-7 ↗
46. Fabrication of relief gratings on high photosensitive SiO2/ZrO2 gel film by UV exposure
47. Thermal degradation of poly(α-methylstyrene) in solution10.1016/0141-3910(95)00242-1 ↗
48. Preparation and characterization of doped sol-gel zirconia films10.1016/S0272-8842(01)00101-8 ↗
49. Sol-gel derived TiO2: ZrO2 multilayer thin films for humidity sensing application10.1016/j.snb.2007.06.029 ↗