journal article·2022-05

The effect of upper layer in optical capacitor based on SiO2/SiNx/SiO2/Si structure

I. Parkhomenko, L. Vlasukova, I. Romanov, F. Komarov, A. Mudryi, N. Kovalchuk, S. Demidovich

Optical Materials· Volume 127
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OpenAlex topics: Semiconductor materials and devices · Silicon Nanostructures and Photoluminescence · Nanowire Synthesis and Applications

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