Organic–inorganic hybrids prepared by carboxylic acid solvolysis: Planar waveguides

Abstract Organic–inorganic hybrid planar waveguides based on the UV sensitive methacryloxypropyltrimethoxysilane (MAPTMS) were prepared through non-hydrolytic sol–gel process by carboxylic acid solvolysis and also containing the fluormonomer precursor 2,2,3,3-tetrafluorpropylmethacrylate (TFPM) and methacrylic acid (MA) modified zirconium alkoxide (ZPO). The absence of water and the incorporation of C F bonding containing precursor contributed to obtain low optical loss in the final material. Characterization techniques included 29 Si-NMR, vibrational spectroscopy and optical characterization of the waveguides with measurements of refractive index, thickness, propagating modes and attenuation coefficient by m-lines prism coupling technique at 632.8, 543.5 and, 1550 nm were performed. The surface of the films was investigated by roughness (RMS) and contact angle measurements.