Interference lithography for the synthesis of three-dimensional lattices in SU-8: Interrelation between porosity, an exposure dose and a grating period
Source abstract
Abstract
Abstract Three-dimensional gratings with different periods were synthesized in SU-8 photoresist through its triple exposure to two-wave interference pattern. Interrelation between porosity, an exposure dose and a grating period were investigated. It was found that decreasing porous grating periods require decreasing density of absorbed laser radiation. Moreover, decrease of grating periods leads to a narrow range of radiation dose that allows us to obtain porous structure.
Source: openaire · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: Photonic Crystals and Applications · Photonic and Optical Devices · Optical Coatings and Gratings
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References (20)
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