journal article·1996-07

Microstructural evaluation of optical materials and devices using a combination of focused ion beam sputtering and transmission electron microscopy

Robert Hull

Optical Materials· Volume 6· Issue 1-2
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Research context

OpenAlex topics: Integrated Circuits and Semiconductor Failure Analysis · Electron and X-Ray Spectroscopy Techniques · Ion-surface interactions and analysis

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References (23)

Show source-provided references
1. Hirsch · 1965
2. Spence · 1988
3. 1986
4. Chu · J. Electrochem. Soc. · 1984 · 131 · 266310.1149/1.2115378 ↗
5. Benedict · 1990 · 199 · 189
6. J.F. Walker and R. Hull, unpublished data.
7. Harriot · J. Vac. Sci. Technol. B · 1987 · 5 · 20710.1116/1.583865 ↗
8. Kirk · 1989 · 100 · 501
9. Basile · 1992 · 254 · 23
10. Szot · J. Vac. Sci. Technol. B · 1992 · 10 · 57510.1116/1.586415 ↗
11. Hull · Appl. Phys. Lett. · 1993 · 62 · 340810.1063/1.109032 ↗
12. Overwijk · J. Vac. Sci. Technol. B · 1993 · 11 · 202110.1116/1.586537 ↗
13. Yamaguchi · J. Vac. Sci. Technol. B · 1993 · 11 · 201610.1116/1.586536 ↗
14. Ben Assayag · J. Vac. Sci. Technol. B · 1993 · 11 · 53110.1116/1.586840 ↗
15. Pfeiffer · 1994 · 171
16. Choquette · Appl. Phys. Lett. · 1995 · 66 · 314310.1063/1.113371 ↗
17. Janssens · Appl. Phys. Lett. · 1995 · 67 · 153010.1063/1.114482 ↗
18. Voss · Z. Naturforsch. A · 1980 · 35 · 97310.1515/zna-1980-0913 ↗
19. Hall · Phil. Mag. · 1966 · 14 · 97910.1080/14786436608244769 ↗
20. Perovic · Phil. Mag. A · 1991 · 63 · 75710.1080/01418619108213912 ↗
21. Hull · Appl. Phys. Lett. · 1995 · 66 · 34110.1063/1.114206 ↗
22. Spence · 1992
23. Phillips · Phys. Rev. B · 1984 · 29 · 568310.1103/PhysRevB.29.5683 ↗