Photosensitive polyimides having N-sulfonyloxyimide and N-carbonyloxyimide groups in the main chain

Abstract Photodegradation behavior was investigated for positive-type polyimides simultaneously containing N-sulfonyloxyimide (or N-carbonyloxyimide) groups and cyclobutane rings in the main chain. The polyimides underwent photo-induced decomposition through the cleavage of N–O bond as well as cyclobutane ring, affording maleimide as a photoproduct. The polyimides exhibited enhanced photosensitivity compared to conventional cyclobutane-containing polyimides.