Structural and optical properties of Cu nanoparticles embedded in Si3N4/Si by ion implantation

Abstract Cu nanoparticles (NPs) have been fabricated in Si3N4/Si by 45 keV Cu ion implantation at a dose of 1 × 1017 cm−2, and followed by thermal processing at 500–700 °C in air. Techniques, such as atomic force microscopy and X-ray diffraction are used to confirm the formation and evolutions of Cu NPs. The surface plasmon resonance of Cu NPs has been investigated by reflection spectroscopy. The orange–red luminescence band (600 nm) with high fluorescence quantum efficiency has been observed in Cu NPs, and its possible mechanism has also been discussed.