Elaboration, structural characterization and optical properties of the yttrium alkoxide derived Y2O3 planar optical waveguides

Abstract Y2O3 optical planar waveguides are fabricated by the sol–gel method and the dip-coating technique. High purity yttrium alkoxide (yttrium 2-methoxyethoxide) is used as starting material for the Y2O3 sol and acetylacetone is added to improve the stability of the sol. Highly concentrated sol up to 0.8 M is prepared and six stacked layers are enough to support four propagation modes at wavelength from 488 to 632.8 nm. The cubic phase of Y2O3 is crystallized after an annealing treatment at 700 °C. X-ray diffraction is conducted on the films for their structural analysis. Optical properties of the waveguides are determined by multi-wavelength m-lines spectroscopy and attenuation coefficient measurement. The attenuation coefficient of the prepared Y2O3 waveguiding thin films is in the range between 1 and 2 dB/cm at 632.8 nm.