Investigation of the optical and electro-optical properties of hexagonal boron nitride thin films deposited by PECVD technique

Thin films of hexagonal boron nitride (h-BN) are deposited on glass-ITO substrates by a plasma enhanced chemical vapour deposition (PECVD) process. Investigations of guiding and optical properties of films are performed by using m-lines spectroscopy. Ordinary and extraordinary refractive indices and the optical anisotropy are determined from TE and TM mode excitations. Electro-optic characterisation is performed using the guided mode angular shift technique.