journal article·2003-10

Improvement in the quality of LiCaAlF6 single crystal as window material

H. Sato, A. Bensalah, A. Yoshikawa, M. Nikl, H. Machida, T. Fukuda

Optical Materials· Volume 24· Issue 1-2
Publisher page

Abstract

Abstract Three-in. size LiCaAlF 6 (LiCAF) single crystals were successfully grown by the Czochralski method. Both measurements of the transmission spectra in the VUV regions and the X-ray rocking curve analysis showed that the crystallinity of LiCAF single crystal was improved by the annealing. Optical absorption measurements in the UV/VIS spectral regions following X-ray irradiation were performed in order to compare the radiation damage with a lithography-grade CaF 2 crystal.
Source: openaire · Quality: candidate unverified · Source record ↗

Research context

OpenAlex topics: Luminescence Properties of Advanced Materials · Inorganic Fluorides and Related Compounds · Molten salt chemistry and electrochemical processes

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

References (11)

Show source-provided references
1. The National Technology Roadmap for Semiconductors. Edited by Semiconductor Industry Association
2. Harriott · Mater. Sci. Semicond. Process. · 1998 · 1 · 9310.1016/S1369-8001(98)00019-5 ↗
3. R. Harbison, in: Proceedings of the First International Symposium on 157 nm Lithography, vol. 1, Dana Point, California, USA, 2000, pp. 9–33
4. Hooker · Prog. Quantum Electron. · 1994 · 18 · 22710.1016/0079-6727(94)90002-7 ↗
5. Whitfield · Diam. Relat. Mater. · 2001 · 10 · 69310.1016/S0925-9635(00)00518-5 ↗
6. T.M. Bloomstein, V. Liberman, M. Rothschild, D.E. Hardy, R.B. Goodman, in: Proceedings of Emerging Lithographic Technologies III, vol. 342, SPIE, 1999, p. 367610.1117/12.351106 ↗
7. Bloomstein · J. Vac. Sci. Technol. · 1997 · B15 · 211210.1116/1.589230 ↗
8. Belt · J. Cryst. Growth · 1991 · 109 · 34010.1016/0022-0248(91)90201-F ↗
9. Shimamura · J. Cryst. Growth · 1999 · 197 · 89610.1016/S0022-0248(98)00974-9 ↗
10. Sato · J. Appl. Phys. · 2002 · 91 · 566610.1063/1.1466525 ↗
11. 1968 · vol. 1 · 112