Densification of sol–gel TiO2 very thin films studied by SPR measurements

Very thin TiO2 films have been prepared by sol–gel and deposited on a silver layer for Surface Plasmon Resonance (SPR) measurements. Densification of the samples has been studied by determining from SPR measurements the optical index (ranging from 1.68 to 1.92) and thickness (ranging from 6 to 2 nm) at each step of the annealing procedure. The structure of the layer (amorphous and/or crystalline) has been checked at the final stage of the thermal treatment by High Resolution Transmission Electron Microscopy (HRTEM).