journal article·2024-03

The wet-etching behaviors of the SiO2 layer in LiNbO3-on-insulator structure

Shao-Mei Zhang, Jin-Hua Zhao

Optical Materials· Volume 149
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Abstract

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Research context

OpenAlex topics: Photorefractive and Nonlinear Optics · Semiconductor materials and devices · Photonic and Optical Devices

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References (17)

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