Exploring the synergistic effects of aluminum and hydrogen impurities on high-electron-mobility sputtered-ZnO thin films
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OpenAlex topics: ZnO doping and properties · Ga2O3 and related materials · Copper-based nanomaterials and applications
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References (62)
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1. Wide bandgap oxide semiconductors: from materials Physics to optoelectronic devices10.1002/adma.202006230 ↗
2. ITO-free organic solar cells with oxide/metal/oxide multilayer structure cathode10.1016/j.orgel.2022.106614 ↗
3. PLD of transparent and conductive AZO thin films10.1016/j.ceramint.2022.10.054 ↗
4. Hydrogen roles approaching ideal electrical and optical properties for undoped and Al doped ZnO thin films
5. Manipulating the optoelectronic characteristic of AZO films by magnetron sputtering power10.1016/j.vacuum.2023.111849 ↗
6. RF sputtered AZO thin films: a potential TCO for various opto-electronic applications
7. AZO work function enhanced by oxygen plasma immersion ion implantation10.1016/j.vacuum.2023.112038 ↗
8. Synergy of indium doping and hydrogenation for good-performance and high-mobility ZnO electrode films
9. Al/F codoping effect on the structural, electrical, and optical properties of ZnO films grown via atomic layer deposition10.1016/j.apsusc.2020.147734 ↗
10. Characterization of the structural and optical properties of ZnO thin films doped with Ga, Al and (Al+Ga)10.1016/j.jallcom.2017.07.265 ↗
11. Zinc-vacancy-donor complex: a crucial compensating acceptor in ZnO10.1103/PhysRevApplied.2.021001 ↗
12. Zinc interstitial threshold in Al-doped ZnO film: effect on microstructure and optoelectronic properties10.1063/1.5021736 ↗
13. Aluminum migration and intrinsic defect interaction in single-crystal zinc oxide10.1103/PhysRevApplied.3.024003 ↗
14. Interstitial hydrogen in ZnO and BeZnO10.1016/j.ijhydene.2013.02.059 ↗
15. Hydrogen as a cause of doping in zinc oxide10.1103/PhysRevLett.85.1012 ↗
16. Hydrogen: a relevant shallow donor in zinc oxide10.1103/PhysRevLett.88.045504 ↗
17. High-performance low-temperature transparent conducting aluminum-doped ZnO thin films and applications10.1016/j.jcrysgro.2005.10.040 ↗
18. Effects of post-rapid thermal annealing on structural, electrical and optical properties of hydrogenated aluminum doped zinc oxide thin films10.1007/s10854-013-1327-7 ↗
19. Growth of transparent conducting nanocrystalline Al doped ZnO thin films by pulsed laser deposition10.1016/j.jcrysgro.2006.06.035 ↗
20. Effect of the RF sputtering power on microstructural, optical and electrical properties of Al doped ZnO thin films10.1016/j.tsf.2015.06.035 ↗
21. Textured aluminum-doped zinc oxide thin films from atmospheric pressure chemical-vapor deposition10.1063/1.351309 ↗
22. Spatial distribution of neutral oxygen vacancies on ZnO nanowire surfaces: an investigation combining confocal microscopy and first principles calculations10.1063/1.4813517 ↗
23. Modeling of carrier mobility against carrier concentration in arsenic-, phosphorus-, and boron-doped silicon10.1109/T-ED.1983.21207 ↗
24. Group III impurity doped zinc oxide thin films prepared by RF magnetron sputtering10.1143/JJAP.24.L781 ↗
25. Comparing thermal durability and effects of annealing temperature on characteristics of hydrogen-doped ZnO, AZO, and GZO thin films10.1155/2021/5530606 ↗
26. He · 2018
27. Hydrogen enhancing Ga doping efficiency and electron mobility in high-performance transparent conducting Ga-doped ZnO films10.1016/j.jallcom.2020.158518 ↗
28. Pressure dependence of the lattice dynamics of ZnO: an ab initio approach10.1103/PhysRevB.69.094306 ↗
29. Growth and characteristics of hydrogenated In-doped ZnO thin films by pulsed DC magnetron sputtering10.1016/j.apsusc.2009.09.026 ↗
30. Raman investigation of N-implanted ZnO: defects, disorder and recovery10.1002/jrs.5732 ↗
31. Raman and photoluminescence study of Al,N-codoped ZnO films deposited at oxygen-rich conditions by magnetron sputtering
32. Infrared dielectric functions and phonon modes of high-quality ZnO films10.1063/1.1526935 ↗
33. Clustered vacancies in ZnO: chemical aspects and consequences on physical properties10.1088/1361-6463/aaa992 ↗
34. High mobility hydrogenated zinc oxide thin films10.1016/j.solmat.2017.01.030 ↗
35. Structural, electrical, and optical properties of hydrogen-doped ZnO films10.1103/PhysRevB.86.115334 ↗
36. First-principles study of the diffusion of hydrogen in ZnO10.1103/PhysRevLett.96.205504 ↗
37. Hydrogen in ZnO revisited: bond center versus antibonding site
38. Band-gap tailoring of ZnO by means of heavy Al doping10.1103/PhysRevB.37.10244 ↗
39. Fundamentals of zinc oxide as a semiconductor10.1088/0034-4885/72/12/126501 ↗
40. Modeling of intrinsic electron and hole trapping in crystalline and amorphous ZnO10.1002/aelm.201900760 ↗
41. Green luminescent center in undoped zinc oxide films deposited on silicon substrates10.1063/1.1394173 ↗
42. Photoluminescence dependence of ZnO films grown on Si(100) by radio-frequency magnetron sputtering on the growth ambient10.1063/1.1568543 ↗
43. Structural, defect and optical properties of ZnO films grown under various O 2/Ar gas ratios10.1016/j.apsusc.2009.07.025 ↗
44. Correlation between photoluminescence and oxygen vacancies in ZnO phosphors
45. Evidences of V O , V Z n , and O i defects as the green luminescence origins in ZnO10.1063/1.4844735 ↗
46. Origin of green luminescence in ZnO thin film grown by molecular-beam epitaxy10.1063/1.2064308 ↗
47. Photoluminescence investigation of the carrier recombination processes in ZnO quantum dots and nanocrystals10.1103/PhysRevB.73.165317 ↗
48. Role of zinc interstitials and oxygen vacancies of ZnO in photocatalysis: a bottom-up approach to control defect density10.1039/C4NR01887G ↗
49. Carrier concentration dependence of band gap shift in n -type ZnO:Al films10.1063/1.2721374 ↗
50. Effects of B 2 O 3 doping on the crystalline structure and performance of DC-magnetron-sputtered, transparent ZnO thin films10.1364/AO.395051 ↗
51. Substrate temperature dependence of the properties of ZAO thin films deposited by magnetron sputtering10.1016/S0169-4332(03)00523-3 ↗
52. Origin of high carrier mobility and low residual stress in RF superimposed DC sputtered Al doped ZnO thin film for next generation flexible devices10.1016/j.apsusc.2017.11.274 ↗
53. Influence of the target power on the microstructure and electrical properties of Al-doped ZnO thin films deposited at room temperature10.1016/j.ceramint.2020.01.237 ↗
54. Optical and electrical properties of Al doped ZnO thin film with preferred orientation in situ grown at room temperature10.1016/j.ceramint.2019.04.149 ↗
55. Improvement of the properties of direct-current magnetron-sputtered Al-doped ZnO polycrystalline films containing retained Ar atoms using 10-nm-Thick buffer layers10.1021/acsomega.9b01761 ↗
56. Influence of hydrogen plasma treatment on Al-doped ZnO thin films for amorphous silicon thin film solar cells10.1016/j.cap.2010.11.109 ↗
57. Structural and optoelectronic properties of AZO thin films prepared by RF magnetron sputtering at room temperature10.1016/S1003-6326(16)64275-9 ↗
58. High conductivity along with high visible light transparency in Al implanted sol-gel ZnO thin film with an elevated figure of merit value as a transparent conducting layer10.1016/j.jallcom.2020.155221 ↗
59. Enhanced mobility in visible-to-near infrared transparent Al-doped ZnO films10.1016/j.solener.2013.07.009 ↗
60. Correlation of structural, electrical and optical properties of Al-doped ZnO TCOs10.1007/s10854-022-07876-9 ↗
61. Highly conducting and transparent low-E window films with high figure of merit values based on RF sputtered Al and in co-doped ZnO10.1016/j.mssp.2020.105240 ↗
62. AZO (Al:ZnO) thin films with high figure of merit as stable indium free transparent conducting oxide10.1016/j.apsusc.2019.02.146 ↗