Stamping of a replica with resolution doubling that of the master via capillary force lithography

Abstract The replicas with resolution doubling have been fabricated by capillary force lithography. We studied several masters with characteristic sizes range from micron to submicron. Replicas with resolution doubling fabricated by a DVD master were demonstrated and discussed in detail. The fabricated replicas demonstrated an average period of ~370 nm, which is half period of the DVD master. This method breaks the rule of one-to-one replication. The key factor to fabricate a replica with resolution doubling is to utilize a thin film with the thickness between 50 nm and 100 nm for the DVD master. Therefore, it seems to be no threshold for anyone to apply this method. Meanwhile it exhibits excellent reproducibility and stability.