Fabrication of ion-sliced yttrium-aluminum-garnet thin films on silica by He+ implantation and Cu–Sn bonding
Source abstract
Abstract
Abstract The fabrication of sub-micron-thickness ion-sliced yttrium-aluminum-garnet thin films on silica is performed by He+ implantation and the Cu–Sn bonding. The formation of blisters on He-ion-implanted YAG crystals caused by thermal annealing is investigated. YAG thin films with an area of approximately 6 mm × 5 mm are produced. The implanted YAG crystals and fabricated YAG thin films are investigated using optical, transmission electron, and scanning electron microscopy, as well as prism-coupling methods. A YAG thin film with a low-refractive-index silica cladding can be used as a waveguide to manufacture photonic components with high refractive index contrast.
Source: openaire · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: Photorefractive and Nonlinear Optics · Photonic and Optical Devices · Solid State Laser Technologies
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
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