Planar single-crystal thin-films of YAG obtained by ion implantation and thermal exfoliation: Mechanical properties

Abstract We report on the fabrication of single-crystal thin films of Yttrium Aluminum Garnet (YAG, Y 3 Al 5 O 12 ) obtained by thermal exfoliation from bulk crystals after deep He-ion implantation. The film qualities and exfoliation process were determined by AFM, optical microscopy, SEM, optical profilometer and nanoindentation. The resulting films were subjected to annealing at ∼1200 °C to relax the residual strain and film curvature that arose from the ion implantation process.