journal article·2023-03

Two-photon shape-modulated maskless lithography of positive photoresist of S1813

Qian-Hua Li, Guo-Juan Xu, Chang Cheng, Rong Zou, Xiao-Jie Li, Ren-De Ma, Hong-Zhong Cao

Optical Materials· Volume 137
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Abstract

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Research context

OpenAlex topics: Nonlinear Optical Materials Studies · Nanofabrication and Lithography Techniques · Orbital Angular Momentum in Optics

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References (25)

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