Effects of structural defects on laser-induced damage of 355-nm high-reflective coatings sputtered on etched substrates

Abstract Laser-induced damage of ultraviolet (UV) coatings poses a great challenge and restricts its application in space. Coatings prepared by ion beam sputtering are dense and possess high laser-induced damage threshold (LIDT), which are absence of structural nodule defects. Subsurface damage defects easily exposed by etching are inevitable under substrate grinding and polishing processes, which are usually ignored in electron-beam evaporation coatings. In our experiments, we find that LIDT of 355-nm high-reflection (HR) coatings sputtered on etched substrates declines dramatically, meanwhile defect density increases. Pits are found on the surface of the substrates and the coatings, and the pits that induce laser damage are very small (submicron-scale). Laser damage morphologies reveal that damage sites are prone to occur around the pits caused by acid etching. Finite element analysis shows consistent results, enhancement of electric field and rise of temperature are obvious, and the most significant part is around the pits, which is prone to induce damage. To conclude, small structural defects are sensitive to laser-induced damage of HR coatings prepared by dual ion beam sputtering (DIBS). This work contributes to finding new ways of improving the LIDT of sputtering coatings.