journal article·2015-11

Ion beam induced luminescence analysis of defect evolution in lithium fluoride under proton irradiation

A. Quaranta, G. Valotto, M. Piccinini, R.M. Montereali

Optical Materials· Volume 49
Publisher page

Abstract

Abstract Ion beam induced luminescence (IBIL) spectra of pure LiF under irradiation by a 2 MeV proton beam were analyzed as a function of the dose in order to deepen the kinetic mechanisms underlying the formation of luminescent point defects. The intensity evolution with dose at several emission wavelengths has been studied within a wide spectral interval, from ultraviolet (UV) to near infrared (NIR), and their different change rates have been correlated to the electronic defect formation processes. The intensity at few selected wavelengths was analyzed with a multiple linear regression (MLR) method in order to demonstrate that a linear calibration curve can be obtained and that an on-line optical dose monitor for ion beams can be realized.
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Research context

OpenAlex topics: Ion-surface interactions and analysis · Integrated Circuits and Semiconductor Failure Analysis · Electron and X-Ray Spectroscopy Techniques

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