journal article·2025-10

Crystalline evolution of c-axis aligned IGZO thin films: From deposition to post-annealing

Yi-Nung Chao, Yuan-Chieh Lu, Gui-Sheng Zeng, Sheng-Hui Chen

Optical Materials· Volume 167
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Abstract

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Research context

OpenAlex topics: Thin-Film Transistor Technologies · Transition Metal Oxide Nanomaterials · ZnO doping and properties

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