journal article·2025-07

Optical modeling of SiOx thin films for physicochemical property measurement by spectroscopic ellipsometry

Fangqi Ge, Likun Wang, Gaorong Han, Yong Liu, Sainan Ma

Optical Materials· Volume 164
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Abstract

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OpenAlex topics: Silicon Nanostructures and Photoluminescence · Thin-Film Transistor Technologies · Ion-surface interactions and analysis

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