journal article·2024-06

Improved uniformity of atomic-layer-deposited HfO2 film along the length of glass monocapillary with high length-diameter ratio

Yanli Li, Hongchang Wu, Wensi Lv, Xiangdong Kong, Li Han, He Zhang

Optical Materials· Volume 152
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OpenAlex topics: Semiconductor materials and devices · Electronic and Structural Properties of Oxides · ZnO doping and properties

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