journal article·2022-08

Achieving super resolution lithography based on bulk plasmon polaritons of hyperbolic metamaterials

Jinlei Hu, Zhenxing Li, Zheng-Da Hu, Jingjing Wu, Jicheng Wang

Optical Materials· Volume 130
Publisher page

Abstract

No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.

Source: Not provided · Quality: missing

Research context

OpenAlex topics: Metamaterials and Metasurfaces Applications · Plasmonic and Surface Plasmon Research · Photonic Crystals and Applications

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

References (47)

Show source-provided references
1. Generation of pure two-beam interference grating structures in an optical fiber with a femtosecond infrared source and a phase mask10.1364/OL.29.001730 ↗
2. Synthesis of silicon nanowires and nanofin arrays using interference lithography and catalytic etching10.1021/nl802129f ↗
3. Fabrication of photonic crystals for the visible spectrum by holographic lithography10.1038/35003523 ↗
4. Design and fabrication of diverse metamaterial structures by holographic lithography10.1364/OE.16.011275 ↗
5. Liquid immersion deep-ultraviolet interferometric lithography10.1116/1.591000 ↗
6. EUV lithography: lithography gets extreme10.1038/nphoton.2009.251 ↗
8. Plasmonic nanolithography10.1021/nl049573q ↗
9. Surface plasmon resonant interference nanolithography technique10.1063/1.1760221 ↗
10. Fabrication of 50 nm period gratings with multilevel interference lithography10.1364/OL.33.001572 ↗
11. Inversion method characterization of graphene- based coordination absorbers incorporating periodically patterned metal ring metasurfaces10.3390/nano10061102 ↗
12. Period reduction lithography in normal UV range with surface plasmon polaritons interference and hyperbolic metamaterial multilayer structure10.7567/APEX.8.062004 ↗
13. Large-area maskless surface plasmon interference for one- and two-dimensional periodic nanoscale feature patterning10.1364/JOSAA.27.000095 ↗
14. A detailed study of resonance-assisted evanescent interference lithography to create high aspect ratio, super-resolved structures10.1364/OE.21.013710 ↗
15. Enhancing aspect profile of half-pitch 32 nm and 22 nm lithography with plasmonic cavity lens10.1063/1.4914000 ↗
16. Surface plasmon-based nanopatterning assisted by gold nanospheres10.1088/0957-4484/19/02/025305 ↗
17. Toward nanometer-scale optical photolithography: utilizing the near-field of bowtie optical nanoantennas10.1021/nl052322c ↗
18. Principles of electromagnetic waves in metasurfaces10.1007/s11433-015-5688-1 ↗
19. Near-field images of the AgOx-type super-resolution near-field structure10.1063/1.1345832 ↗
20. Surface plasmon interference lithography with a surface relief metal grating10.1016/j.optcom.2012.09.072 ↗
21. Pushing the resolution of photolithography down to 15nm by surface plasmon interference10.1038/srep05618 ↗
22. Large-area high aspect ratio plasmonic interference lithography utilizing a single high-k mode10.1021/acsnano.5b06137 ↗
23. Large area deep subwavelength interference lithography with a 35 nm half-period based on bulk plasmon polaritons10.1364/OME.8.000199 ↗
24. Design of a structured bulk plasmon illumination source for enhancing plasmonic cavity superlens imaging
25. Two noise-robust axial scanning multi-image phase retrieval algorithms based on Pauta criterion and smoothness constraint10.1364/OE.25.016235 ↗
26. Double image encryption by using iterative random binary encoding in gyrator domains10.1364/OE.18.012033 ↗
27. Color image encryption by using Arnold transform and color-blend operation in discrete cosine transform domains10.1016/j.optcom.2010.09.013 ↗
28. Significantly increased surface plasmon polariton mode excitation using a multilayer insulation structure in a metal-insulator-metal plasmonic waveguide10.1364/AO.53.003642 ↗
29. Optical hyperlens:far-field imaging beyond the diffraction limit10.1364/OE.14.008247 ↗
30. Far-field OpticalHyperlens magnifying sub-diffraction-limited objects10.1126/science.1137368 ↗
31. Directed sub-wavelength imaging using a layered metaldielectric system10.1103/PhysRevB.74.115116 ↗
32. Electromagnetic wave propagation in media with indefinite permittivity and permeability tensors10.1103/PhysRevLett.90.077405 ↗
33. Backward waves and negative refraction in uniaxial dielectrics with negative dielectric permittivity along the anisotropy axis10.1002/mop.10887 ↗
34. Hyperbolic metamaterials: fusing artificial structures to natural 2D materials10.1186/s43593-021-00008-6 ↗
35. Hyperbolic metamaterials: from dispersion manipulation to applications10.1063/1.5128679 ↗
36. Tretyakov · 2003
37. Deep sub-wavelength imaging lithography by a reflective plasmonic slab10.1364/OE.21.020683 ↗
38. Rigorous coupled-wave analysis of planar-grating diffraction10.1364/JOSA.71.000811 ↗
39. Terahertz time-domain spectroscopy: a new tool for the study of glasses in the far infrared10.1016/j.jnoncrysol.2005.08.003 ↗
40. Planar grating diffraction: multiwave coupled-wave theory and modal theory
41. Critical layer thickness analysis of vertically stacked hyperbolic metamaterials for effective negative refraction generation10.1002/adts.202000138 ↗
42. Experimental demonstration of broadband negative refraction at visible frequencies by critical layer thickness analysis in a vertical hyperbolic metamaterial10.1515/nanoph-2021-0337 ↗
43. Realization of broadband negative refraction in visible range using vertically stacked hyperbolic metamaterials10.1038/s41598-019-50434-3 ↗
44. Spherical hyperlens for two-dimensional sub-diffractional imaging at visible frequencies10.1038/ncomms1148 ↗
45. Deep sub-wavelength nanofocusing of UV-visible light by hyperbolic metamaterials10.1038/srep38645 ↗
46. Enhancement of electromagnetically induced transparency in metamaterials using long range coupling mediated by a hyperbolic material10.1364/OE.26.000627 ↗
47. Zero-index and hyperbolic metacavities: fundamentals and applications10.1088/1361-6463/ac2e89 ↗