journal article·2021-01

Ultraviolet optical properties analysis of wurtzite AlN films grown by vapor phase epitaxy

Guifeng Chen, Yin Zhang, Hui Zhang, Luxiao Xie, Zhiwei Xing, Zishuang Cheng, Haoran Li, Yiming Xiao, Haoruo Liang, Huaize Liu, Xinjian Xie, Lifeng Bian, Guodong Liu

Optical Materials· Volume 111
Publisher page

Abstract

Abstract The UV optical properties of (0 0 2) AlN thin films were studied. Under the excitation of 213 nm laser, there are two emission peaks of AlN in UV-A band with thermal quenching phenomenon. Combined with variable temperature Raman experiment, it is proved that the UV emission of AlN is accompanied by a nonradiative transition in the form of lattice thermal vibration. Density functional theory (DFT) calculations show that donor and acceptor levels can be introduced near the conduction band minimum (CBM)and near the valence band maximum (VBM) by the nitrogen vacancy, respectively. Combined with the annealing experiment, it is proved that the nitrogen vacancy (VN) is the main reason for the ultraviolet luminescence of AlN films. These results are highly relevant for a better understanding of the study of the application of AlN based materials in ultraviolet optical devices.
Source: openaire · Quality: candidate unverified · Source record ↗

Research context

OpenAlex topics: GaN-based semiconductor devices and materials · Acoustic Wave Resonator Technologies · ZnO doping and properties

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

References (29)

Show source-provided references
1. Effects of GaN/AlGaN/Sputtered AlN nucleation layers on performance of GaN-based ultraviolet light-emitting diodes
2. Hall-effect measurements of metalorganic vapor-phase epitaxy-grown p-Type homoepitaxial GaN layers with various Mg concentrations10.7567/JJAP.56.031001 ↗
3. High quality GaN buffer layer by isoelectronic doping and its application to 365 nm InGaN/AlGaN ultraviolet light-emitting diodes10.1016/j.apsusc.2018.12.011 ↗
4. The emergence and prospects of deep-ultraviolet light-emitting diode technologies10.1038/s41566-019-0359-9 ↗
5. Design and characterization of a low-optical-loss UV-C laser diode10.35848/1347-4065/abaac6 ↗
6. Boosted ultraviolet electroluminescence of InGaN/AlGaN quantum structures grown on high-index contrast patterned sapphire with silica array
7. Thermal activation, cathodo- and photoluminescence measurements of rare earth doped (Tm, Tb, Dy, Eu, Sm, Yb) amorphous/nanocrystalline AlN thin films prepared by reactive rf-sputtering10.1016/j.optmat.2005.09.024 ↗
8. Structural and optical properties of Er implanted AlN thin films: green and infrared photoluminescence at room temperature10.1016/j.optmat.2010.09.005 ↗
9. Investigation of blue luminescence in Mg doped AlN films10.1016/j.jallcom.2014.10.018 ↗
10. Dynamics of ultraviolet emissions in Tm-doped AIN using above band gap excitation10.1063/1.2970993 ↗
11. High quality AlN grown on SiC by metal organic chemical vapor deposition10.1063/1.2988323 ↗
12. Raman tensor of AlN bulk single crystal10.1364/PRJ.3.000038 ↗
13. Defect and stress characterization of AIN films by Raman spectroscopy10.1063/1.2404938 ↗
14. Raman scattering studies on single-crystalline bulk AlN under high pressures10.1063/1.1344567 ↗
15. A crystallographic model of (00⋅1) aluminum nitride epitaxial thin film growth on (00⋅1) sapphire substrate10.1063/1.356017 ↗
16. Properties of GaN and related compounds studied by means of Raman scattering10.1088/0953-8984/14/38/201 ↗
17. Residual stress in AlN films grown on sapphire substrates by molecular beam epitaxy
18. Micro-Raman scattering properties of highly oriented AlN films10.1142/S0217979298001137 ↗
19. Vibrational properties of AlN grown on (111)-oriented silicon10.1103/PhysRevB.63.125313 ↗
20. Raman scattering spectroscopy of residual stresses in epitaxial AlN films
21. Point defect-induced UV-C absorption in aluminum nitride epitaxial layers grown on sapphire substrates by metal-organic chemical vapor deposition
22. Time‐resolved exciton luminescence in GaN grown by metalorganic chemical vapor deposition10.1063/1.114442 ↗
23. Temperature dependence of Raman scattering in Co-doped AlN whiskers10.1007/s00339-010-5870-2 ↗
24. Temperature dependence of Raman-active modes in AlN10.1016/j.diamond.2005.11.014 ↗
25. Temperature dependence of the AlN E1(to) phonon decay, thermal expansion and strain effect in AlN/sapphire by infrared reflection10.1088/0256-307X/30/9/097701 ↗
26. Nitrogen vacancy type defect luminescence of AlN nanopowder10.1016/j.optmat.2020.110069 ↗
27. Spectral features and voltage effects in high-field electroluminescence of AlN filamentary nanocrystals10.1016/j.optmat.2016.05.054 ↗
28. Defect-related energy structures of AlN nanotips probed by photoluminescence10.1088/0022-3727/44/50/505304 ↗
29. Environmentally friendly method to grow wide-bandgap semiconductor aluminum nitride crystals: elementary source vapor phase epitaxy10.1038/srep17405 ↗